Microstructured Porous Pyramid-Based Ultrahigh Sensitive Pressure Sensor Insensitive to Strain and Temperature
Korea Advanced Institute of Science and Technology · Electronics and Telecommunications Research Institute
Indexed incrossrefpubmed
Abstract
An ultrahigh sensitive capacitive pressure sensor based on a porous pyramid dielectric layer (PPDL) is reported. Compared to that of the conventional pyramid dielectric layer, the sensitivity was drastically increased to 44.5 kPa–1 in the pressure range
Citation impact
573
total citations
- FWCI
- 24.21
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- 100%
- References
- 56
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Authors
8- JCJun Chang Yang
Korea Advanced Institute of Science and Technology
- JKJin‐Oh Kim
Korea Advanced Institute of Science and Technology
- JOJinwon Oh
Korea Advanced Institute of Science and Technology
- SYSe Young Kwon
Korea Advanced Institute of Science and Technology
- JYJoo Yong Sim
Electronics and Telecommunications Research Institute
Topics & keywords
Topics
Keywords
- Materials science
- Pressure sensor
- Capacitive sensing
- Dielectric
- Elastomer
- Porosity
- Composite material
- Pyramid (geometry)
UN Sustainable Development Goals
- Life below water
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