articleACS Applied Materials & InterfacesMay 6, 2019Closed access

Microstructured Porous Pyramid-Based Ultrahigh Sensitive Pressure Sensor Insensitive to Strain and Temperature

Korea Advanced Institute of Science and Technology · Electronics and Telecommunications Research Institute

PubMed
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Abstract

An ultrahigh sensitive capacitive pressure sensor based on a porous pyramid dielectric layer (PPDL) is reported. Compared to that of the conventional pyramid dielectric layer, the sensitivity was drastically increased to 44.5 kPa–1 in the pressure range

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