Atom probe tomography

The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and…

• UD
  U.S. Department of Energy

  Awards: AC05-00OR22725, DE-AC05, 00OR22725
• B
  Battelle

  Awards: DE-AC05, DE-AC05-00OR22725
• U
  UT-Battelle

  Awards: DE-AC05-, AC05-00OR22725
• BE
  Basic Energy Sciences

  Awards: DE-AC05-00OR22725, AC05-00OR22725
• OR
  Oak Ridge National Laboratory

  Award: AC05-00OR22725