Aligned, high-density semiconducting carbon nanotube arrays for high-performance electronics

Single-walled carbon nanotubes (CNTs) may enable the fabrication of integrated circuits smaller than 10 nanometers, but this would require scalable production of dense and electronically pure semiconducting nanotube arrays on wafers. We developed a multiple dispersion and sorting process that resulted in extremely high semiconducting purity and a dimension-limited self-alignment (DLSA) procedure for preparing well-aligned CNT arrays (within alignment of 9 degrees) with a tunable density of 100 to 200 CNTs per micrometer on a 10-centimeter silicon wafer. Top-gate field-effect transistors (FETs) fabricated on the CNT array show better performance than that of commercial silicon metal oxide-semiconductor FETs…

• NN
  National Natural Science Foundation of China

  Award: 61888102
• NK
  National Key Research and Development Program of China Stem Cell and Translational Research

  Award: 2016YFA0201900