Microengineering Pressure Sensor Active Layers for Improved Performance

Abstract Pressure sensors play an integral role in a wide range of applications, such as soft robotics and health monitoring. In order to meet this demand, many groups microengineer the active layer—the layer that deforms under pressure and dictates changes in the output signal—of capacitive, resistive/piezoresistive, piezoelectric, and triboelectric pressure sensors in order to improve sensor performance. Geometric microengineering of the active layer has been shown to improve performance parameters such as sensitivity, dynamic range, limit of detection, and response and relaxation times. There are a wide range of implemented designs, including microdomes, micropyramids, lines or microridges, papillae,…

• UD
  U.S. Department of Defense
• OR
  Oak Ridge Institute for Science and Education
• IC
  Intelligence Community Postdoctoral Research Fellowship Program
• ND
  National Defense Science and Engineering Graduate