articleMaterials TodayApr 23, 2005HYBRID OA

Ferroelectric thin films

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Abstract

The area of ferroelectric thin films has expanded rapidly recently with the advent of high quality multi-oxide deposition technology. Advances in thin film quality has resulted in the realization of new technologies not achievable through classical bulk ceramic processing techniques. An example of this progress is the co-processing of ferroelectric thin films with standard semiconductor silicon and GaAs integrated circuits for radiation hard, non-volatile memory products. While the development of this class of products is still embryonic, the forecasted market potential is rapidly out distancing the combined developmental effort. Historically the greatest use of bulk ferroelectric material has been in sensor…

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Topics & keywords

Keywords
  • Ferroelectricity
  • Materials science
  • Thin film
  • Nanotechnology
  • Optoelectronics
  • Dielectric
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