articleNature ElectronicsFeb 21, 2022GREEN OA

Scaled indium oxide transistors fabricated using atomic layer deposition

MSMengwei SiZLZehao LinZCZhizhong ChenXSXing SunHWHaiyan Wang

Shanghai Jiao Tong University · Purdue University West Lafayette

Indexed inarxivcrossref

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279
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6

Topics & keywords

Topics
Keywords
  • Materials science
  • Transistor
  • Transconductance
  • Optoelectronics
  • Atomic layer deposition
  • Indium
  • Oxide
  • Threshold voltage
UN Sustainable Development Goals
  • Affordable and clean energy
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