Deep learning in optical metrology: a review
Nanjing University of Science and Technology · Queen Mary University of London · +1 more institution
Abstract
With the advances in scientific foundations and technological implementations, optical metrology has become versatile problem-solving backbones in manufacturing, fundamental research, and engineering applications, such as quality control, nondestructive testing, experimental mechanics, and biomedicine. In recent years, deep learning, a subfield of machine learning, is emerging as a powerful tool to address problems by learning from data, largely driven by the availability of massive datasets, enhanced computational power, fast data storage, and novel training algorithms for the deep neural network. It is currently promoting increased interests and gaining extensive attention for its utilization in the field of…
Citation impact
- FWCI
- 59.47
- Percentile
- 100%
- References
- 438
Authors
9Topics & keywords
- Metrology
- Computer science
- Deep learning
- Artificial intelligence
- Field (mathematics)
- Artificial neural network
- Systems engineering
- Machine learning
- Industry, innovation and infrastructure
Funding
- QMQueen Mary University of London
- NTNanyang Technological University
- NNNational Natural Science Foundation of ChinaAwards: 62075096, BRA2016407, 62005121, U21B2033
- GOGovernment of Jiangsu ProvinceAwards: BRA2016407, BZ2020007, BK20192003
- NUNanjing University of Science and Technology
- NUNanjing University
- FRFundamental Research Funds for the Central UniversitiesAwards: 30921011208, 30919011222, 30920032101, 30920032101, BRA2016407, 30919011222, 30921011208