articlePhotonics ResearchApr 12, 2022Closed access

Silicon nitride passive and active photonic integrated circuits: trends and prospects

University of California, Santa Barbara

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Abstract

The use of silicon nitride in integrated photonics has rapidly progressed in recent decades. Ultra-low-loss waveguides based on silicon nitride are a favorable platform for the research of nonlinear and microwave photonics and their application to a wide variety of fields, including precision metrology, communications, sensing, imaging, navigation, computation, and quantum physics. In recent years, the integration of Si and III-V materials has enabled new large-scale, advanced silicon nitride-based photonic integrated circuits with versatile functionality. In this perspective article, we review current trends and the state-of-the-art in silicon nitride-based photonic devices and circuits. We highlight the…

Citation impact

325
total citations
FWCI
44.79
Percentile
100%
References
178
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Authors

3

Topics & keywords

Keywords
  • Photonics
  • Silicon nitride
  • Photonic integrated circuit
  • Materials science
  • Optoelectronics
  • Silicon photonics
  • Electronic circuit
  • Integrated circuit
UN Sustainable Development Goals
  • Industry, innovation and infrastructure
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