articleNatureApr 6, 2022GREEN OA

Ultrathin ferroic HfO2–ZrO2 superlattice gate stack for advanced transistors

Berkeley College · University of California, Berkeley · +13 more institutions

PubMed
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Abstract

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Citation impact

344
total citations
FWCI
27.97
Percentile
100%
References
94
Citations per year

Authors

46

Topics & keywords

Keywords
  • Superlattice
  • Stack (abstract data type)
  • Transistor
  • Optoelectronics
  • Materials science
  • Nanotechnology
  • Computer science
  • Electrical engineering
UN Sustainable Development Goals
  • Affordable and clean energy
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