A Progress Review on Solid‐State LiDAR and Nanophotonics‐Based LiDAR Sensors

Abstract Light detection and ranging (LiDAR) sensors enable precision sensing of an object in 3D. LiDAR technology is widely used in metrology, environment monitoring, archaeology, and robotics. It also shows high potential to be applied in autonomous driving. In traditional LiDAR sensors, mechanical rotator is used for optical beam scanning, which brings about limitations on their reliability, size, and cost. These limitations can be overcome by a more compact solid‐state solution. Solid‐state LiDAR sensors are commonly categorized into the following three types: flash‐based LiDAR, microelectromechanical system (MEMS)‐based LiDAR, and optical phased array (OPA)‐based LiDAR. Furthermore, advanced optics…