reviewNano-Micro LettersOct 21, 2022DIAMOND OA

Recent Progress on Flexible Room-Temperature Gas Sensors Based on Metal Oxide Semiconductor

Fudan University · State Key Laboratory of ASIC and System · +2 more institutions

PubMed
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Abstract

With the rapid development of the Internet of Things, there is a great demand for portable gas sensors. Metal oxide semiconductors (MOS) are one of the most traditional and well-studied gas sensing materials and have been widely used to prepare various commercial gas sensors. However, it is limited by high operating temperature. The current research works are directed towards fabricating high-performance flexible room-temperature (FRT) gas sensors, which are effective in simplifying the structure of MOS-based sensors, reducing power consumption, and expanding the application of portable devices. This article presents the recent research progress of MOS-based FRT gas sensors in terms of sensing mechanism,…

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