Ultrasensitive Linear Capacitive Pressure Sensor with Wrinkled Microstructures for Tactile Perception

Abstract Ultrasensitive flexible pressure sensors with excellent linearity are essential for achieving tactile perception. Although microstructured dielectrics have endowed capacitive sensors with ultrahigh sensitivity, the compromise of sensitivity with increasing pressure is an issue yet to be resolved. Herein, a spontaneously wrinkled MWCNT/PDMS dielectric layer is proposed to realize the excellent sensitivity and linearity of capacitive sensors for tactile perception. The synergistic effect of a high dielectric constant and wrinkled microstructures enables the sensor to exhibit linearity up to 21 kPa with a sensitivity of 1.448 kPa −1 and a detection limit of 0.2 Pa. Owing to these merits, the sensor…

• CA
  China Association for Science and Technology
• NN
  National Natural Science Foundation of China

  Awards: 52075384, 62001325