articleNature MaterialsMar 23, 2023Closed access

Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible

JKJoohoon KimJSJunhwa SeongWKWonjoong KimGLGun‐Yeal LeeSKSeokwoo Kim

Pohang University of Science and Technology · Korea University · +3 more institutions

PubMed
Indexed incrossrefpubmed

Abstract

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255
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19.27
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100%
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46
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Authors

22

Topics & keywords

Topics
Keywords
  • Materials science
  • Nanoimprint lithography
  • Wafer
  • Lithography
  • Immersion lithography
  • Nanotechnology
  • Optoelectronics
  • Fabrication
UN Sustainable Development Goals
  • Affordable and clean energy
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