articleNature NanotechnologyApr 27, 2023GREEN OA

Low-thermal-budget synthesis of monolayer molybdenum disulfide for silicon back-end-of-line integration on a 200 mm platform

JZJiadi ZhuJHJi Hoon ParkSASteven A. VitaleWGWenjun GeGSGang Seob Jung

Massachusetts Institute of Technology · MIT Lincoln Laboratory · +2 more institutions

PubMed
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Abstract

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244
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22.15
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100%
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Authors

16

Topics & keywords

Topics
Keywords
  • Materials science
  • Wafer
  • Molybdenum disulfide
  • Silicon
  • Monolayer
  • Optoelectronics
  • Nanotechnology
  • Chemical vapor deposition
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