articleNature NanotechnologyMay 22, 2023GREEN OA

Scalable CMOS back-end-of-line-compatible AlScN/two-dimensional channel ferroelectric field-effect transistors

University of Pennsylvania · Hanyang University · +5 more institutions

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Abstract

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Citation impact

207
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FWCI
21.63
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100%
References
39
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Authors

21

Topics & keywords

Keywords
  • Materials science
  • Scalability
  • Transistor
  • Optoelectronics
  • CMOS
  • Computer science
  • Field-effect transistor
  • Non-volatile memory
UN Sustainable Development Goals
  • Affordable and clean energy
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