articleNature MaterialsSep 28, 2023Closed access

12-inch growth of uniform MoS2 monolayer for integrated circuit manufacture

YXYin XiaXCXinyu ChenJWJinchen WeiSWShuiyuan WangSCShiyou Chen

Fudan University · State Key Laboratory of Surface Physics · +3 more institutions

PubMed
Indexed incrossrefpubmed

Abstract

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Citation impact

217
total citations
FWCI
19.84
Percentile
100%
References
48
Citations per year

Authors

11

Topics & keywords

Topics
Keywords
  • Wafer
  • Monolayer
  • Materials science
  • Nanotechnology
  • Semiconductor
  • Chemical vapor deposition
  • Compound semiconductor
  • Integrated circuit
UN Sustainable Development Goals
  • Industry, innovation and infrastructure
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