preprintQeiosOct 22, 2023DIAMOND OA

Review of: "Amplification of Nano Wires Nano Wire by Electron Nano Lithography"

GAIL (India)

Indexed incrossref

Abstract

Potential competing interests: No potential competing interests to declare. Note: Electron beam nano-lithography is usually performed in a special environment or in equipment designed specifically for this purpose. In both cases, an electron beam with accurate focus isscanned sequentially along the sample to show resistance.The electron beam nano-lithography process is inherently slow compared to other methods because the electron beam requires a limited time at each point of exposure.It is rare to be exposed to a sample multiple times.Some developments are underway for multi-electron beam exposure .In contrast to long exposure times, very high resolution (below 100 nm) is typically achieved by electron beam…

Citation impact

513
total citations
FWCI
53.53
Percentile
100%
References
10
Citations per year

Authors

1

Topics & keywords

Keywords
  • Nano-
  • Nanotechnology
  • Materials science
  • Lithography
  • Electron-beam lithography
  • Composite material
  • Optoelectronics
  • Resist
No related works found for this paper.