preprintQeiosJan 9, 2024DIAMOND OA

Review of: "A combination of interference nanolithography and nanoelectronics lithography enables the fabrication and reproduction of high-resolution structures in large areas"

Indexed incrossref

Abstract

Potential competing interests: No potential competing interests to

Citation impact

441
total citations
FWCI
74.09
Percentile
100%
References
13
Citations per year

Authors

1

Topics & keywords

Keywords
  • Nanolithography
  • Nanoelectronics
  • Lithography
  • Fabrication
  • Nanotechnology
  • Materials science
  • Interference (communication)
  • Interference lithography
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