Grinding mechanism and surface quality evaluation strategy of single crystal 4H-SiC
Shandong University · City University of Hong Kong, Shenzhen Research Institute · +3 more institutions
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Abstract
No abstract available for this paper.
Citation impact
106
total citations
- FWCI
- 17.70
- Percentile
- 100%
- References
- 35
Citations per year
Authors
8- SQShuoshuo QuCorresponding
Shandong University, City University of Hong Kong, Shenzhen Research Institute
- CWChengxiang Wei
Shandong University, City University of Hong Kong, Shenzhen Research Institute
- YYYuying Yang
Qilu University of Technology, Shandong Academy of Sciences
- PYPeng YaoCorresponding
Shandong University, City University of Hong Kong, Shenzhen Research Institute
- DCDongkai Chu
Shandong University, City University of Hong Kong, Shenzhen Research Institute
Topics & keywords
Topics
Keywords
- Grinding
- Monocrystalline silicon
- Materials science
- Surface roughness
- Brittleness
- Composite material
- Surface (topology)
- Mechanism (biology)
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