Probing single electrons across 300-mm spin qubit wafers

Abstract Building a fault-tolerant quantum computer will require vast numbers of physical qubits. For qubit technologies based on solid-state electronic devices 1–3 , integrating millions of qubits in a single processor will require device fabrication to reach a scale comparable to that of the modern complementary metal–oxide–semiconductor (CMOS) industry. Equally important, the scale of cryogenic device testing must keep pace to enable efficient device screening and to improve statistical metrics such as qubit yield and voltage variation. Spin qubits 1,4,5 based on electrons in Si have shown impressive control fidelities 6–9 but have historically been challenged by yield and process variation 10–12 . Here we…