Super-stealth dicing of transparent solids with nanometric precision
Jilin University · State Key Laboratory on Integrated Optoelectronics · +2 more institutions
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Abstract
No abstract available for this paper.
Citation impact
109
total citations
- FWCI
- 18.35
- Percentile
- 100%
- References
- 62
Citations per year
Authors
12- ZLZhen‐Ze Li
Jilin University, State Key Laboratory on Integrated Optoelectronics, Tsinghua University
- HFHua Fan
Jilin University, State Key Laboratory on Integrated Optoelectronics, Tsinghua University
- LWLei Wang
Jilin University, State Key Laboratory on Integrated Optoelectronics
- XZXu Zhang
Jilin University, State Key Laboratory on Integrated Optoelectronics
- XZXinjing Zhao
Jilin University, State Key Laboratory on Integrated Optoelectronics
Topics & keywords
Topics
Keywords
- Wafer dicing
- Materials science
- Biophotonics
- Nanotechnology
- Optoelectronics
- Optics
- Photonics
- Physics
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