Nano-optical wafers are produced using the nano-lithography process on wafers with a diameter of 100 or 150 mm. Nano-optical chips are created from small wafers    

Note: Some materials can give rise to regular, nanoscale structures under appropriate and controlled conditions - self-assembly. The problem of this approach is the lack of flexibility in the structures that can be achieved and the materials that can be used, which limits the functions that can be realized.