A Review of Thin-Film Growth, Properties, Applications, and Future Prospects
National Taipei University of Technology · Ming Chi University of Technology · +2 more institutions
Abstract
This review article’s primary aim is to discuss different thin-film deposition technique methods and their important uses. The histories of thin-film technology, thin-film growth, thin-film classification, and thin-film preparation techniques are also covered in this review article. The preparation and characterization of functional thin films and nanostructured materials, as well as various devices based on these materials and recent developments are also focused on in this review. The properties of the materials and several thin-film deposition techniques are also covered in this article. This review article also discusses the classification and application of thin-film sensors. Furthermore, the formation of…
Citation impact
- FWCI
- 25.18
- Percentile
- 100%
- References
- 201
Authors
7- SSSubramanian SakthinathanCorresponding
National Taipei University of Technology
- GAGanesh Abinaya Meenakshi
National Taipei University of Technology
- SVSivaramakrishnan Vinothini
National Taipei University of Technology
- CYChung‐Lun Yu
National Taipei University of Technology
- CCChing‐Lung Chen
Ming Chi University of Technology, Chang Gung University
Topics & keywords
- Materials science
- Nanotechnology
- Engineering physics
- Engineering