Review for Micro‐Nano Processing Technology of Microstructures and Metadevices

Abstract As a popular artificial composite material emerging in recent years, metasurfaces are one of the most likely devices to break through the volume limitation of conventional optical components due to their compact structure, flexible materials, and high modulation resolution of the beam. With a unique arrangement of units or made of special materials, the metasurface can effectively modulate the incident light's amplitude, phase, polarization, and frequency, thus realizing applications such as communication, imaging, sensing, and beam steering. The interaction of high‐resolution structure, periodic arrangement, and unique constituent materials makes it possible to realize these applications, so…