articleApplied Surface ScienceMar 11, 2025Closed access

Microdynamic behaviors of Au/Ni-assisted chemical etching in fabricating silicon nanostructures

WWWenxuan WuYCYun ChenBXBin XieHWHengxu WuLCLiang Cheng

Guangdong University of Technology

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Abstract

No abstract available for this paper.

Citation impact

42
total citations
FWCI
25.68
Percentile
100%
References
48
Citations per year

Authors

9

Topics & keywords

Topics
Keywords
  • Materials science
  • Etching (microfabrication)
  • Silicon
  • Nanostructure
  • Isotropic etching
  • Nanotechnology
  • Optoelectronics
  • Layer (electronics)
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