articleNature Reviews Methods PrimersMar 13, 2025Closed access

Multiphoton 3D lithography

ESEdvinas SkliutasGMGreta MerkininkaitėSMShoji MaruoWZWenxin ZhangWCWenyuan Chen

Vilnius University · Laser Research Institute · +5 more institutions

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Abstract

No abstract available for this paper.

Citation impact

47
total citations
FWCI
24.95
Percentile
100%
References
228
Citations per year

Authors

9

Topics & keywords

Topics
Keywords
  • Lithography
  • Materials science
  • Maskless lithography
  • Computer science
  • Nanotechnology
  • Optoelectronics
  • Electron-beam lithography
  • Resist
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