articleACS SensorsMar 24, 2025Closed access

NiO/ZnO Nanocomposites for Multimodal Intelligent MEMS Gas Sensors

Shanghai University of Engineering Science · Shanghai Jiao Tong University · +3 more institutions

PubMed
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Abstract

Gas sensor arrays designed for pattern recognition face persistent challenges in achieving high sensitivity and selectivity for multiple volatile organic compounds (VOCs), particularly under varying environmental conditions. To address these limitations, we developed multimodal intelligent MEMS gas sensors by precisely tailoring the nanocomposite ratio of NiO and ZnO components. These sensors demonstrate enhanced responses to ethylene glycol (EG) and limonene (LM) at different operating temperatures, demonstrating material-specific selectivity. Additionally, a multitask deep learning model is employed for real-time, quantitative detection of VOCs, accurately predicting their concentration and type. These…

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