reviewACS NanoMar 28, 2025GREEN OA

Nanofabrication for Nanophotonics

YYYounghwan YangYJYoungsun JeonZDZhaogang DongJKJoel K. W. YangMHMahsa Haddadi Moghaddam

Pohang University of Science and Technology · Agency for Science, Technology and Research · +50 more institutions

PubMed
Indexed incrossrefpubmed

Abstract

Nanofabrication, a pivotal technology at the intersection of nanoscale engineering and high-resolution patterning, has substantially advanced over recent decades. This technology enables the creation of nanopatterns on substrates crucial for developing nanophotonic devices and other applications in diverse fields including electronics and biosciences. Here, this mega-review comprehensively explores various facets of nanofabrication focusing on its application in nanophotonics. It delves into high-resolution techniques like focused ion beam and electron beam lithography, methods for 3D complex structure fabrication, scalable manufacturing approaches, and material compatibility considerations. Special attention…

Citation impact

92
total citations
FWCI
90.36
Percentile
100%
References
1,208
Citations per year

Authors

73

Topics & keywords

Topics
Keywords
  • Nanolithography
  • Nanophotonics
  • Nanotechnology
  • Materials science
  • Medicine
  • Fabrication
UN Sustainable Development Goals
  • Industry, innovation and infrastructure
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