Review of: "Nanoelectro Systems ( NEMS ) The integration of Nanoelectric Elements, Sensors, Actuators, and Nanoelectronic Devices on a Silicon Basis by Micron-Sized Manufacturing Technology"
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Abstract
No abstract available for this paper.
Citation impact
46
total citations
- FWCI
- 26.60
- Percentile
- 100%
- References
- 86
Too recent for citation history.
Authors
1Topics & keywords
Topics
Keywords
- Nanoelectromechanical systems
- Actuator
- Microelectromechanical systems
- Silicon
- Materials science
- Nanotechnology
- Engineering
- Electrical engineering
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