Far-field femtosecond laser-driven λ/73 super-resolution fabrication of 2D van der Waals NbOI2 nanostructures in ambient air

The design and fabrication of ultrafine nanostructures in two-dimensional (2D) van der Waals materials are crucial for the functionalization of electronic devices. Here, we report the utilization of far-field femtosecond laser patterning to fabricate super-resolution nano-groove array (NGA) structures in 2D multilayer NbOI2 in ambient air, achieving groove widths as low as ~14.5 nm (~λ/73). The NGA structures maintain a well-defined single-crystal NbOI2 with amorphous Nb2O5 edges as narrow as 3.2 nm. The formation mechanism of NGA structure is confirmed to be associated with the coupled field of surface plasmon polariton periodic field and nano-groove-induced local near-field induced by femtosecond laser…

• NN
  National Natural Science Foundation of China

  Awards: 52272146, 51902069, 52105437, 61925304
• HI
  Harbin Institute of Technology
• NS
  Natural Science Foundation of Heilongjiang Province

  Award: YQ2021E019
• NK
  National Key Research and Development Program of China

  Award: 2023YFB4605102
• FR
  Fundamental Research Funds for the Central Universities

  Award: HIT.OCEF.2024001