bookTopics in applied physicsJan 1, 2007Closed access

Sputtering by Particle Bombardment

RBR. BehrischWEW. Eckstein

Max Planck Institute for Plasma Physics · Max Planck Society

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

776
total citations
FWCI
11.48
Percentile
100%
References
7
Citations per year

Authors

2

Topics & keywords

Topics
Keywords
  • Sputtering
  • Particle (ecology)
  • Computer science
  • Physics
  • Materials science
  • Geology
  • Nanotechnology
  • Thin film
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