articleJournal of Materials Processing TechnologyJan 2, 2026Closed access

High-efficiency submerged air jet chemical mechanical polishing at the atomic and close-to-atomic scale

ZZZili ZhangSYSong YuanCFChi Fai CheungWWWei WuZLZe Li

Hong Kong Polytechnic University · Shenzhen University

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Abstract

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4
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FWCI
81.29
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100%
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66
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7

Topics & keywords

Topics
Keywords
  • Polishing
  • Chemical-mechanical planarization
  • Brittleness
  • Figuring
  • Jet (fluid)
  • Process (computing)
  • Surface roughness
  • Chemical process
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