Deformation-adaptive pressure sensors based on multi-level discrete sensing arrays for morphing electronics and human–machine interaction

Stretchable pressure sensors are essential for intelligent machine perception and human-machine interactions, yet their accuracy is often compromised by deformation, due to limited strain tolerance of continuous-structure sensing materials. To resolve this issue, we propose a multi-level discrete array strategy to fabricate superior deformation-adaptive sensors. Then, an innovative and eco-friendly approach is developed to fabricate micro-nano hierarchical ZnO arrays through combined plasma-enhanced atomic layer deposition and hydrothermal growth. The micro-scale pattern acts as first-level discrete structure, enabling high stretchability of sensor, while ZnO nanorods function as the secondary structure to…

• NN
  National Natural Science Foundation of China

  Awards: 52575638, 52172098
• NK
  National Key Research and Development Program of China

  Award: 2023YFB3208402