Multi-physical field coupling polishing of diamond for atomic-scale damage-free surface

Abstract Diamond is renowned for its high stability in extreme environments, such as high temperatures, high pressures, and strong corrosive conditions, which makes it demonstrate irreplaceable superior performance in quantum devices, high-power optical systems, and ultra-high-frequency electronic devices. Nevertheless, its intrinsic brittleness, difficulty in material removal, and vulnerability to damage caused by processing severely limit its practical application. The inherently rough surface of as-grown diamond necessitates precision polishing to obtain ultra-smooth, damage-free surface with nanometer-scale roughness, sub-micrometer form accuracy, and minimal subsurface damage. This paper provides a…

• NN
  National Natural Science Foundation of China

  Award: No. 52035009
• NK
  National Key Research and Development Program of China

  Award: No. 2023YFE0203800
• BA
  Basic and Applied Basic Research Foundation of Guangdong Province

  Award: 2025A1515011366