Cross‐Scale High‐Precision Characterization for Three‐Dimensional Profiles of Curved Diffractive Microstructures
National University of Defense Technology · Nano and Advanced Materials Institute
Abstract
Macroscopic substrate surface errors and microscopic groove parameters influence the optical performance of curved diffractive microstructures. However, existing profile measurement techniques face a trade-off between large-area coverage and high resolution, which limits the ability of conventional two-dimensional (2D) line-profile methods to capture the global grating morphology. To address existing limitations, this study proposes a three-dimensional (3D) profile characterization method for curved gratings across macro- and micro-scales. Seamless reconstruction of full-aperture 3D topography with submicron-scale features was achieved using laser scanning confocal microscopy-based stitching measurements.…
Citation impact
- FWCI
- 91.41
- Percentile
- 99%
- References
- 50
Authors
10- YZYufang ZhouCorresponding
National University of Defense Technology
- TLTao Lai
National University of Defense Technology, Nano and Advanced Materials Institute
- HLHuang Li
National University of Defense Technology
- WLWenwen LU
Nano and Advanced Materials Institute
- FCFulei Chen
National University of Defense Technology
Topics & keywords
- Image stitching
- Grating
- Characterization (materials science)
- Feature (linguistics)
- Planar
- Distortion (music)
- Laser scanning
- Feature extraction