Modelling and experimental study of nanomilling 3D nanogrooves on GaSb surfaces
National University of Singapore · Harbin Institute of Technology
Abstract
Abstract Atomic force microscopy (AFM) tip-based nanofabrication is a simple and feasible method for machining nanostructures. However, existing studies primarily focus on fabricating grooves with constant width and depth, with limited research dedicated to the fabrication of three-dimensional (3D) grooves. In this study, an AFM tip-based nanomilling technique is employed to fabricate 3D nanogrooves on single-crystal gallium antimonide (GaSb), with a focus on investigating the underlying material removal mechanism and subsurface damage. To enable accurate prediction of 3D groove profiles, a theoretical model was established to estimate the machining depth, accounting for variations in the vibration frequency…
Citation impact
- FWCI
- 73.72
- Percentile
- 100%
- References
- 47
Authors
6Topics & keywords
- Machining
- Fabrication
- Nanolithography
- Vibration
- Gallium antimonide
- Dislocation
- Rotation (mathematics)
- Groove (engineering)