DSFB Structural Semiotics Engine for Semiconductor Process Control - A Deterministic Augmentation Layer for Typed Residual Interpretation for Fault Detection and Run-to-Run Variation in Advanced Manufacturing
Indexed indatacite
Abstract
DSFB does not compete with SPC, EWMA, or FDC — it augments them. Those systemscontinue to operate unchanged. DSFB reads the residual streams they already produceand returns a typed, deterministic, human-readable interpretation of what the residualsmean structurally. On the SECOM public benchmark under a fixed Stage III read-onlyprotocol, this augmentation collapses 28,607 raw boundary episodes into 71 policy-governedReview/Escalate episodes while preserving 104/104 labeled failure events. Episode precisionrises from a raw-boundary proxy of 0.36% to 80.3% — a 220.8× improvement in operatorrelevance. The upstream SPC and EWMA systems are not modified, replaced, or disabled.If DSFB is removed, upstream behavior…
Citation impact
25
total citations
- FWCI
- —
- Percentile
- —
- References
- 19
Too recent for citation history.
Authors
1Topics & keywords
Topics
Keywords
- Residual
- Semiconductor device fabrication
- Fault detection and isolation
- Process control
- EWMA chart
- Boosting (machine learning)
- Process (computing)
- Bounded function
UN Sustainable Development Goals
- Industry, innovation and infrastructure
No related works found for this paper.