DSFB Structural Semiotics Engine for Semiconductor Process Control - A Deterministic Augmentation Layer for Typed Residual Interpretation for Fault Detection and Run-to-Run Variation in Advanced Manufacturing

Clariant (United States)

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Abstract

DSFB does not compete with SPC, EWMA, or FDC — it augments them. Those systemscontinue to operate unchanged. DSFB reads the residual streams they already produceand returns a typed, deterministic, human-readable interpretation of what the residualsmean structurally. On the SECOM public benchmark under a fixed Stage III read-onlyprotocol, this augmentation collapses 28,607 raw boundary episodes into 71 policy-governedReview/Escalate episodes while preserving 104/104 labeled failure events. Episode precisionrises from a raw-boundary proxy of 0.36% to 80.3% — a 220.8× improvement in operatorrelevance. The upstream SPC and EWMA systems are not modified, replaced, or disabled.If DSFB is removed, upstream behavior…

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Topics & keywords

Keywords
  • Residual
  • Semiconductor device fabrication
  • Fault detection and isolation
  • Process control
  • EWMA chart
  • Boosting (machine learning)
  • Process (computing)
  • Bounded function
UN Sustainable Development Goals
  • Industry, innovation and infrastructure
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