JO
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
JournalAmerican Institute of Physics
18,077
Publications
398,308
Citations
Loading papers...
Search by keywords
Filter by Type
- Article (17,940)
- Erratum (85)
- Review (35)
- Preprint (14)
- Editorial (2)
Filter by Open Access Type
- Open Access (2,365)
- Closed Access (15,712)
Filter by Authors
- S. J. Pearton (96)
- G. S. Oehrlein (76)
- Lars Hultman (61)
- Mark J. Kushner (60)
- G. Margaritondo (58)
Filter by Topics
- Semiconductor materials and devices (4,850)
- Metal and Thin Film Mechanics (3,501)
- Plasma Diagnostics and Applications (2,122)
- Ion-surface interactions and analysis (1,667)
- Diamond and Carbon-based Materials Research (1,506)