AM
Advanced MEMS and NEMS Technologies
This cluster of papers covers a wide range of topics related to Microelectromechanical Systems (MEMS), including silicon properties, microfabrication techniques, resonators, actuators, sensors, reliability issues, RF switches, nanomechanical testing, and thermal behavior.
68,945
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664,993
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- Masayoshi Esashi (357)
- Hiroyuki Fujita (328)
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- Advanced MEMS and NEMS Technologies (165,802)
- Mechanical and Optical Resonators (45,271)
- Acoustic Wave Resonator Technologies (33,865)
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