reviewSensors and Actuators A PhysicalMay 9, 2014Closed access

Electrostatic pull-in instability in MEMS/NEMS: A review

WZWenming ZhangHYHan YanZPZhike PengGMGuang Meng

Shanghai Jiao Tong University

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

574
total citations
FWCI
31.08
Percentile
100%
References
293
Citations per year

Authors

4

Topics & keywords

Topics
Keywords
  • Nanoelectromechanical systems
  • Microelectromechanical systems
  • Instability
  • Nanotechnology
  • Nonlinear system
  • Computer science
  • Materials science
  • Physics
No related works found for this paper.