articleJournal of ElectroceramicsJan 1, 2004GREEN OA

Thin Film Piezoelectrics for MEMS

STSusan Trolier‐McKinstryPMPaul Muralt

Pennsylvania State University · École Polytechnique Fédérale de Lausanne

Indexed incrossref

Abstract

No abstract available for this paper.

Citation impact

1,000
total citations
FWCI
21.17
Percentile
100%
References
68
Citations per year

Authors

2

Topics & keywords

Topics
Keywords
  • Materials science
  • Piezoelectricity
  • Lead zirconate titanate
  • Ferroelectricity
  • Microelectromechanical systems
  • Phase boundary
  • Piezoelectric coefficient
  • Resonator
UN Sustainable Development Goals
  • Affordable and clean energy
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