articleMeasurement Science and TechnologyJan 16, 2002Closed access

An Introduction to Microelectromechanical Systems Engineering

NMN.I. Maluf

Norwood Hospital

Indexed incrossref

Abstract

If you've not been involved in MEMS (MicroElectroMechanical Systems) technology or had the cause to use MEMS devices, then you may wonder what all the fuss is about. What are MEMS anyway? What's the difference between MEMS and MST (MicroSystems Technology)? What are the advantages over existing technologies? If you have ever found yourself pondering over such questions, then this book may be for you.

Citation impact

697
total citations
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46.43
Percentile
100%
References
75
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Authors

1

Topics & keywords

Topics
Keywords
  • Microelectromechanical systems
  • Microsystem
  • Wonder
  • Computer science
  • Mechanical engineering
  • Engineering
  • Nanotechnology
  • Materials science
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