articleSensors and Actuators A PhysicalJan 17, 2007Closed access

Squeeze film air damping in MEMS

MBMinhang BaoHYHeng Yang

Fudan University · State Key Laboratory of Transducer Technology

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Abstract

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Citation impact

690
total citations
FWCI
30.53
Percentile
100%
References
70
Citations per year

Authors

2

Topics & keywords

Topics
Keywords
  • Microelectromechanical systems
  • Mechanics
  • Nonlinear system
  • Reynolds equation
  • Materials science
  • Magnetic damping
  • Isothermal process
  • Torsion (gastropod)
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