articleNature NanotechnologyJan 28, 2007Closed access

Ultra-sensitive NEMS-based cantilevers for sensing, scanned probe and very high-frequency applications

MLMo LiHXHong X. TangMLM. L. Roukes

California Institute of Technology · Yale University

PubMed
Indexed incrossrefpubmed

Abstract

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Citation impact

1,039
total citations
FWCI
51.72
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100%
References
36
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Authors

3

Topics & keywords

Topics
Keywords
  • Cantilever
  • Microscale chemistry
  • Nanoelectromechanical systems
  • Materials science
  • Piezoresistive effect
  • Optoelectronics
  • Microelectromechanical systems
  • Nanosensor
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