Nanoelectromechanical systems

Nanoelectromechanical systems (NEMS) are drawing interest from both technical and scientific communities. These are electromechanical systems, much like microelectromechanical systems, mostly operated in their resonant modes with dimensions in the deep submicron. In this size regime, they come with extremely high fundamental resonance frequencies, diminished active masses,and tolerable force constants; the quality (Q) factors of resonance are in the range Q∼103–105—significantly higher than those of electrical resonant circuits. These attributes collectively make NEMS suitable for a multitude of technological applications such as ultrafast sensors, actuators, and signal processing components. Experimentally,…

• NS
  National Science Foundation

  Awards: 0089061, ECS-0210752, 0324416, 0216274, 0315662, 0210752
• DA
  Defense Advanced Research Projects Agency
• DO
  Division of Materials Research