Review of: "Micro and nano-electromechanical systems ( MEMS / NEMS ) are devices in which the physical motion of a micro- or nano-scale structure is controlled by an electronic circuit"
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Abstract
Potential competing interests: No potential competing interests to
Citation impact
313
total citations
- FWCI
- 59.82
- Percentile
- 100%
- References
- 24
Citations per year
Authors
1Topics & keywords
Topics
Keywords
- Nanoelectromechanical systems
- Nano-
- Microelectromechanical systems
- Nanoscopic scale
- Materials science
- Nanotechnology
- Composite material
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